发明名称 |
Lanthanum oxide-based gate dielectrics for integrated circuit field effect transistors |
摘要 |
Lanthanum oxide-based gate dielectrics are provided for integrated circuit field effect transistors. The gate dielectrics may include lanthanum oxide, preferably amorphous lanthanum oxide and/or an alloy of lanthanum oxide and silicon oxide, such as lanthanum silicate (La2SiO5). Lanthanum oxide-based gate dielectrics may be fabricated by evaporating lanthanum on a silicon surface of an integrated circuit substrate. The lanthanum may be evaporated in the presence of oxygen. Lanthanum and silicon may be co-evaporated. An anneal then may be performed. Lanthanum oxide-based dielectrics also may be used for integrated circuit capacitors.
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申请公布号 |
US6531354(B2) |
申请公布日期 |
2003.03.11 |
申请号 |
US20010764253 |
申请日期 |
2001.01.17 |
申请人 |
NORTH CAROLINA STATE UNIVERSITY |
发明人 |
MARIA JON-PAUL;KINGON ANGUS IAN |
分类号 |
H01L21/02;H01L21/28;H01L21/316;H01L21/8242;H01L29/51;(IPC1-7):H01L21/823;H01L29/108;H01L29/76;H01L29/94;H01L31/119 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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