发明名称 Method of automatically analyzing patterns
摘要 There is disclosed a method of automatically analyzing many repeating patterns. One typical pattern is first selected. On the typical pattern, analysis points, analysis methods and analysis conditions are determined. On the other patterns, automatic analysis is performed at points having the same positional relation as the analysis points determined on the typical pattern with the analysis methods and analysis conditions determined for the typical pattern.
申请公布号 US6532300(B1) 申请公布日期 2003.03.11
申请号 US19980160835 申请日期 1998.09.25
申请人 JEOL LTD. 发明人 NODA OSAMU
分类号 G06T7/00;(IPC1-7):G06K9/00 主分类号 G06T7/00
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