METHOD OF PERFORMING HOMOGENEOUS AND HETEROGENEOUS REACTIONS BY MEANS OF PLASMA

摘要

FIELD: chemical technologies; electronics; chemical industry; metallurgy. SUBSTANCE: proposed method includes delivery of reactive gas from reactive gas source to vacuum reaction chamber where supersonic flow is formed in such way that rarefaction zone is formed at chamber inlet in its center portion at reduced density relative to adjacent parts of flow; said flow of reactive gas is subjected to activation by acting on it with electron beam introduced in rarefaction zone. EFFECT: enhanced productivity; reduced capital outlays; increased utilization factor. 5 cl, 4 dwg