摘要 |
<p>A method of manufacturing an optical device, by forming a cavity (5) of a desired shape in an optical substrate (3) comprising the steps of irradiating, with radiation from a laser source (1), a mask (2) whose surface is patterned in accordance with the desired shape of the cavity (5); and projecting the radiation transmitted through the mask (2) onto the substrate (3) such that substrate material is ablated from an area thereof exposed to the radiation, thereby forming the required cavity (5) in such a way that at least one sidewall of the cavity has a desired inclination relative to a chosen axis.</p> |