| 摘要 |
PURPOSE: An ink jet printer head manufacturing method is provided to integrally forming an ink jet printer head by an electric chemical batch process for simplifying the mass-production, and remove the joining and assembling per part or the whole parts for reducing the lead time. CONSTITUTION: An ink jet printer head manufacturing method includes the steps of preparing a substrate, forming a crater layer(14) at a lower part of the substrate by photolithography and plating, forming a nozzle plate(18) at a lower part of the crater layer by photolithography and plating, forming a flow channel plate(22) at a lower part of the nozzle plate by photolithography and plating, forming a reservoir plate(26) at a lower part of the flow channel plate by photolithography and plating, forming a restricter plate(30) at a lower part of the reservoir plate by photolithography and plating, forming a vibration plate at a lower part of the chamber plate by plating, removing the substrate, removing all remaining photoresist, forming a piezoelectric/electro-striction film(40) which carries out actuating in response to power supply on to the vibration plate, forming upper electrodes on of the piezoelectric/electro-restriction film.
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