METHOD FOR MANUFACTURING LOW LOSS THIN FILM INDUCTOR

摘要

PURPOSE: A method for manufacturing a low loss thin film inductor is provided to reduce coil loss of the inductor by increasing the thickness of the coil of the inductor, while allowing for an ease of manufacture. CONSTITUTION: A method comprises a first step of forming a soft magnetic layer(102) on a substrate(101); a second step of forming an insulating layer(103) on the soft magnetic layer; a third step of forming a seed layer(104) for an electro-plating on the insulating layer; a fourth step of forming a photoresist layer on the seed layer, and forming a pattern of a desired coil shape using the photoresist; and a fifth step of forming a coil portion(107) to the pattern of the coil shape through an electro-plating process; and a sixth step of removing the photoresist remaining around the coil portion formed in the fifth step, and attaching an upper magnetic film(109) on the resultant structure.