FIXING APPARATUS OF BOAT FOR LOADING WAFER AND FIXING METHOD USING THE SAME

摘要

PURPOSE: A fixing apparatus of a boat for loading a wafer and a fixing method using the same are provided to connect a boat with a boat cap regardless of a damage of a fixing hole of a boat cap by forming a plurality of fixing holes on both sides of the boat cap. CONSTITUTION: A boat is used for loading a semiconductor wafer(103) into the inside of a vertical diffusion furnace. The boat is formed with a quartz material. Three or four rods(102) are inserted between an upper member(100) and a lower member(108). A plurality of slots(104) are formed at the rods(102). An edge portion of the wafer(103) is inserted into the slot(104). The first fixing holes(106) are formed at the lower plate member(108) in order to connect the boat with a boat cap(112). The second fixing holes(110) are formed on both sides of the boat cap(112).