GAP CONTROL REVIEW APPARATUS FOR SEMICONDUCTOR PROCESS CHAMBER

摘要

PURPOSE: A gap control review apparatus for a semiconductor process chamber is provided to identify easily a gal count operation by using a digital display portion though a gap counter error is generated from an encoder. CONSTITUTION: A gap control apparatus is formed with a driving motor(22), an encoder(23), and a digital display portion(24). The driving motor(22) is used for controlling a gap between electrode plates. An upper electrode plate is elevated by the driving motor(22) in order to control a gap. The encoder(23) is used for performing a gap counting operation in the driving motor(22). A digital indicator(24) is installed at the encoder(23) in order to identify the cap counting operation. A reset button(25) is formed at the digital display portion(24).