发明名称 SIMULTANEOUSLY BAKING SILICON NITRIDE CIRCUIT BOARD AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a simultaneously baking silicon nitride circuit board which has a high thermal conductivity and excellent heat sink properties, which has a high strength and small occurrence of a fault due to a release of a conductor layer (metallized layer) and which can be formed in a small size and to provide a method for manufacturing the same. SOLUTION: The simultaneously baking silicon nitride circuit board 1a comprises a silicon nitride board 2a, and simultaneously baking metallized layers 3a, 3b integrally formed on at least a front surface of the board 2a and containing at least one type of high melting point metals of W and Mo as main components. The thermal conductivity of the board 2a is 60 W/m.K or more. An areal ratio of a crystal compound phase in a grain boundary phase of the board 2a with respect to an overall grain boundary phase is 20% or more.
申请公布号 JP2003069172(A) 申请公布日期 2003.03.07
申请号 JP20010258052 申请日期 2001.08.28
申请人 TOSHIBA CORP 发明人 YANO KEIICHI;YAMAGUCHI HARUHIKO;NABA TAKAYUKI
分类号 C04B41/90;H01L23/12;H05K1/03;H05K3/12;H05K3/38;H05K3/46;(IPC1-7):H05K1/03 主分类号 C04B41/90
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