| 摘要 |
PROBLEM TO BE SOLVED: To provide a removing liquid, capable of removing sidewall at a low temperature and in a short time, without corroding a metal wiring material or an interlayer material, etc. SOLUTION: The sidewall-removing liquid, containing a fluorine compound, certain types of amino alcohols, an organic solvent and water having a pH of 9-11, can remove sidewall at a low temperature and in a short time, without corroding the metal wiring material or the interlayer material. |
