发明名称 SEMICONDUCTOR MOUNTING METHOD AND SEMICONDUCTOR MOUNTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor mounting method which can mount a semiconductor device suppressing deviating at thermocompression bonding and have a fine electrode terminal of a connecting pitch to the substrate and to provide the semiconductor device. SOLUTION: The substrate 1 is moved to a thermocompression bonding position just under a heating means 18 by a moving means 22 which fixes and holds the substrate 1 and the substrate 1 which was moved to the thermocompression bonding position by the moving means 22 is adsorbed and fixed by a fixing portion 20 arranged right under the heating means 18. After this, while the heating means 18 thermocompression-bonds the semiconductor device 4, a position deviation of the substrate 1 in the thermocompression bonding position due to thermal expansion at the thermocompression bonding time can be prevented by releasing a fixing state of the substrate 1 by the moving means 22.
申请公布号 JP2003068798(A) 申请公布日期 2003.03.07
申请号 JP20010252098 申请日期 2001.08.22
申请人 CANON INC 发明人 TAKAHASHI MASANORI;OUCHI TOSHIMICHI;NIIHORI KENJI
分类号 H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/60
代理机构 代理人
主权项
地址