| 摘要 |
PROBLEM TO BE SOLVED: To provide an extraction electrode block for an ion implantation device, which can extract an ion beam in a desired direction, and the ion implantation device. SOLUTION: An extraction electrode block 7 has a main electrode 8 and a grounding electrode 9, which are arranged to face each other. The main electrode 8 has an electrode body 12 having a slit 12a that an ion beam IB passes through, and a mount circular plate 13 formed so as to surround the electrode body 12. Graphite or the like is used as material for the electrode body 12, and magnetic material such as magnetic stainless steel is used as material for the mount plate 13. The grounding electrode 9 is of almost the same construction as the main electrode 8, and has an electrode body 14 and a mount plate 15. Since the mount plates 13, 15 are made of magnetic material as described above, the slits 12a, 14a as passages for the ion beam IB are shielded from the magnetic field of a source magnet 6.
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