| 摘要 |
<p>PROBLEM TO BE SOLVED: To solve the problem that, when a thick piezoelectric ceramic plate and a thin substrate, both of which are used for forming a member for piezoelectric element, are stuck to each other through an adhesive layer, the outer peripheral section of the member for piezoelectric elements is warped and, in addition, the thickness of the adhesive layer becomes uneven due to the shrinkage of the adhesive used in the adhesive layer or the polarization performed on the piezoelectric ceramic plate. SOLUTION: At the time of adhering the thick piezoelectric ceramic plate 2 and thin substrate 3, both of which are used for forming the member for piezoelectric element, to each other through the adhesive layer 4, the mean arithmetic surface roughness (Ra) of at least the surface 2b of the ceramic plate 2 on the opposite side of the adhesive surface 2a of the plate 2 is adjusted to <=1μm and, at the same time, the plate 2 is polarized toward the adhesive surface 2a from the surface 2b.</p> |
