发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To expand the range of P-type diffusion condition in a P<+> -type embedded diffusion layer. SOLUTION: An N<+> -type impurity is embedded to form an N<+> -type embedded diffusion layer 11 on a P-type substrate 10 via an oxide film 30 formed in a predetermined thickness. In this case, the thickness of the oxide film 30 is controlled depending on the concentration of N<+> -type impurity to be embedded. Accordingly, the concentration of the N<+> -type impurity in the N<+> -type embedded diffusion layer 11 can be freely controlled. Therefore, the sufficient range of the P-type diffusion condition can be obtained freely in the P<+> -type embedded diffusion layer formed on the N<+> -type embedded diffusion layer 11.
申请公布号 JP2003068868(A) 申请公布日期 2003.03.07
申请号 JP20010259176 申请日期 2001.08.29
申请人 MITSUMI ELECTRIC CO LTD 发明人 WATANABE SADAHISA;OGAWA TAKASHI;KURAGANO TAKAAKI;KASAHARA MASAKI
分类号 H01L21/331;H01L21/225;H01L21/8228;H01L27/082;H01L29/732;(IPC1-7):H01L21/822 主分类号 H01L21/331
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