发明名称 GRINDING APPARATUS
摘要 PROBLEM TO BE SOLVED: To prevent grinding burn or grinding fault from occurring by determining whether or not a grinding liquid is sufficiently supplied between a grindstone brought into contact with a plate-like material of an object to be ground and the grindstone brought into contact with the plate-like material. SOLUTION: A grinding apparatus comprises at least, a grinding wheel 27 having the grindstone 29 and a ring-like base 28 for supporting the grindstone 29, a wheel mounter 26 for supporting the base 28, a grinding water flow passage 34 opened in the base 28 for communicating with the base 28 and the mounter 26, and a grinding water source 35 for supplying grinding water to the passage 34. In this apparatus, the base 28 has a grindstone holder 30 for holding the grindstone 29, and a mounting unit 31 mounted on the mounter 26. The apparatus further comprises a detection means 42 for detecting the water scattered from a gap 46 generated at a coupling part of the unit 31 to the mounter 26, to determine whether or not a sufficient grinding water is supplied to a contact part of the grindstone 29 with the plate-like material, based on the amount of the scattered water, to thereby prevent the grinding burn or the grinding fault from occurring.
申请公布号 JP2003068690(A) 申请公布日期 2003.03.07
申请号 JP20010252880 申请日期 2001.08.23
申请人 DISCO ABRASIVE SYST LTD 发明人 SEKIYA KAZUMA
分类号 B24B7/04;H01L21/304;(IPC1-7):H01L21/304 主分类号 B24B7/04
代理机构 代理人
主权项
地址