| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas supply apparatus which humidifies the gas, and has compatibility between follow-up performance and stabilization of the gas temperature control, which has been difficult before. SOLUTION: The temperature of the gas introduced from a gas supply section 3 is adjusted by a first heater 7 and a cooler 8, wherein the first heater 7 is feedforward controlled and the cooler 8 is feedforward and feedback controlled by a controller 55. The temperature controlled gas flow is separated, one flow being fed to a humidifier 22 and humidified. The temperature of the water used in the humidifier 22 is controlled by feedback controlling a water cooler 49 and a water heater 50. Hence, since the cooling is made in addition to the heating, compatibility is obtained between follow-up performance and stabilization of the temperature control, and moreover, the feedforward control further improves the follow-up performance of the temperature control. |
