| 摘要 |
PROBLEM TO BE SOLVED: To inhibit lowering of productivity in a product line by avoiding production of defective at manufacture of semiconductor device, etc. SOLUTION: An aligner, projectingly exposing a circuit pattern formed on an original plate upon a substrate, comprises a circuit pattern deformation means that deforms a design data of the circuit pattern formed on the original plate or the substrate based on the residual error of alignment, a circuit pattern developing means that develops the design data deformed by the circuit pattern deformation means on a memory as an image data, and a circuit pattern display means that displays the image data of the circuit pattern on the original plate developed on the memory by the circuit pattern developing means and the image data of the circuit pattern on the substrate, while superposing them.
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