发明名称 |
SAMPLE CARRIER IDENTIFICATION DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a sample carrier identification device that can read more inexpensively ID codes indicating the kinds of sample carriers set in a chamber and can be set up easily in a vacuum chamber. SOLUTION: This sample carrier identification device identifies a sample carrier 65 which transports a sample 1 in the vacuum chamber by holding the sample 1. This device is provided with optical structure means B1-B4 which detect 1-bit logical signals provided at prescribed spots of the carrier 65 and optical sensor means S1-S2 which detect the logical signals by projecting detection light upon the prescribed spots of the carrier 65. This identification device is also provided with n sets of combinations of the optical structure means B1-B4 and optical sensor means S1-S2 for identifying the ID of the carrier 65. |
申请公布号 |
JP2003068821(A) |
申请公布日期 |
2003.03.07 |
申请号 |
JP20010252504 |
申请日期 |
2001.08.23 |
申请人 |
ADVANTEST CORP |
发明人 |
HARA TOSHIHIKO;HIRANO MOTOJI |
分类号 |
H01L21/677;H01L21/673;H01L21/68;H01L21/683;(IPC1-7):H01L21/68 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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