发明名称 SAMPLE CARRIER IDENTIFICATION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a sample carrier identification device that can read more inexpensively ID codes indicating the kinds of sample carriers set in a chamber and can be set up easily in a vacuum chamber. SOLUTION: This sample carrier identification device identifies a sample carrier 65 which transports a sample 1 in the vacuum chamber by holding the sample 1. This device is provided with optical structure means B1-B4 which detect 1-bit logical signals provided at prescribed spots of the carrier 65 and optical sensor means S1-S2 which detect the logical signals by projecting detection light upon the prescribed spots of the carrier 65. This identification device is also provided with n sets of combinations of the optical structure means B1-B4 and optical sensor means S1-S2 for identifying the ID of the carrier 65.
申请公布号 JP2003068821(A) 申请公布日期 2003.03.07
申请号 JP20010252504 申请日期 2001.08.23
申请人 ADVANTEST CORP 发明人 HARA TOSHIHIKO;HIRANO MOTOJI
分类号 H01L21/677;H01L21/673;H01L21/68;H01L21/683;(IPC1-7):H01L21/68 主分类号 H01L21/677
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