摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic motor which has features such as silence, high torque, high-speed rotation, by enabling a rotor coupled with a shaft to be tilted, thereby preventing the occurrence of noise, axial deflection of a shaft, and chattering. SOLUTION: This ultrasonic motor is equipped with a stator which vibrates by the drive of a piezoelectric element 1, a rotor 5 which rotates by the vibration of the stator 3 being pressurized to the stator 3, and the shaft 7 which rotates together with the rotor by the rotation of the rotor 5, and the shaft 7 is coupled with one side of the rotor 5, and the shaft 7 and the rotor 5 are coupled with each other by a tiltable rotary coupling means. |