| 发明名称 |
SYSTEM AND METHOD FOR MANAGING SUBSTRATE CARRIER, PROGRAM, RECORDING MEDIUM, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE |
| 摘要 |
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| 申请公布号 |
JP2003068823(A) |
申请公布日期 |
2003.03.07 |
| 申请号 |
JP20010257665 |
申请日期 |
2001.08.28 |
| 申请人 |
MITSUBISHI ELECTRIC CORP;RYODEN SEMICONDUCTOR SYST ENG CORP |
发明人 |
OTANI MASAKI;SATO YASUHIRO;INOBE TAKAMASA;MARUME YASUHIRO;WATANABE TOSHIYUKI |
| 分类号 |
B08B3/02;H01L21/00;H01L21/677;(IPC1-7):H01L21/68 |
主分类号 |
B08B3/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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