发明名称 VACUUM CABLE AND VACUUM PLASMA TREATMENT DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a vacuum cable and a vacuum plasma treatment device in which a plasma can be generated stably. SOLUTION: This is provided with a center conductor 31 and an external conductor 32 to cover the center conductor 31, and the outer peripheral face is covered with a flexible tube 60. Further, this is provided with a metal plate (conducting means) 50 to make the external conductor 32 and a contact preventive plate 22 into an electrically contact, and with a fixing fittings to fix the metal plate 50 to electrically bring into a contact condition, and the metal plate 50 is fixed to the contact preventive plate 22 by means of bolts.
申请公布号 JP2003068499(A) 申请公布日期 2003.03.07
申请号 JP20010260145 申请日期 2001.08.29
申请人 MITSUBISHI HEAVY IND LTD 发明人 UENO MOICHI;MIYAZONO NAOYUKI;SASAGAWA EISHIRO;OTSUBO EIICHIRO
分类号 H05H1/46;B01J3/00;B01J19/08;H01B7/17;H01L21/205 主分类号 H05H1/46
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