MAGNETIC TUNNEL JUNCTION AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a magnetic tunnel junction which can improve electromagnetic property and thermal stability by carrying out rapid heat treatment, and to provide its manufacturing method. SOLUTION: A magnetic tunnel junction is manufactured by forming a magnetic tunnel junction comprising a first magnetic layer 15, a tunnel barrier layer 16 formed at an upper surface of the first magnetic layer 15, and a second magnetic layer 17 formed at an upper surface of the tunnel barrier layer 16; by thermally treating the junction for 5 seconds to 10 minutes at a temperature in the range of 200 to 600 deg.C to re-distribute elements in the tunnel barrier layer 16; and by making the interface between the tunnel barrier layer 16 and the first and second magnetic layers 15, 17 to be even.