| 发明名称 |
Force-sensing transducers, accelerometers, rate sensors, methods of forming force-sensing transducers, and methods of forming vibrating-beam force transducers |
| 摘要 |
Performance-enhancing, reduced-area metalization adhesion areas in force-sensing transducers are described.
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| 申请公布号 |
US2003041668(A1) |
申请公布日期 |
2003.03.06 |
| 申请号 |
US20020183312 |
申请日期 |
2002.06.25 |
| 申请人 |
HULSING RAND H.;SPRAGUE RANDY |
发明人 |
HULSING RAND H.;SPRAGUE RANDY |
| 分类号 |
G01C19/56;G01L1/18;G01P9/04;G01P15/097;G01P15/10;(IPC1-7):G01P9/00 |
主分类号 |
G01C19/56 |
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