ENTANGLED PHOTON ELLIPSOMETRY

摘要

A system for obtaining ellipsometric data from a sample. The system includes a source (12) for providing a monochromatic light beam. The system also includes a nonlinear crystal (14) for converting the monochromatic light beam into photon pairs by disintegrating photons from the monochromatic light beam, such that each of the photon pairs exhibits entanglement properties, wherein one of the photons of the pair is directed to the sample (16) and the other of the photons of the pair is not directed to the sample. The system furhter includes a circuit (40) for calculating the coincidence of one of the photons of the photon pair reflected from the sample and the other of the photons of the photon pair, wherein the measurements of the sample are obtained by analyzing the coincidence and the entanglement properties between one of the photons of the photon pair reflected from the sample and the other of the photons of the photon pair.