Vorrichtung zur Justage eines optischen Elements

摘要

The invention relates to a device for adjusting an optical element (1), especially a lens in an optical system, especially in a projection objective for semiconductor lithography. The optical element (1) is positioned in a mount (3) by means of a plurality of bearing feet (2) which are distributed around the circumference of the optical element (1) and can be deformed by means of adjustment devices (5) in a targeted manner. The adjustment devices (5) are applied to at least part of the bearing feet (2) in a region of the bearing foot (2), in such a way that the respective bearing foot (2) can be displaced in the direction of the optical axis (7).