CELL NUMBER COUNTING APPARATUS AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A cell number counting apparatus and a manufacturing method thereof are provided to simplify manufacturing procedures and reduce size of the apparatus by manufacturing the apparatus through the micro electro mechanical system, while achieving improved accuracy of cell number counting. CONSTITUTION: A cell number counting apparatus comprises a capillary(20) formed on a silicon substrate(80), and which serves as a passage for the liquid containing cells to be counted; an injected cell storing unit(30) formed at an end of the capillary, and which stores the liquid injected into the capillary; a discharged cell storing unit(40) formed at the other end of the capillary, and which stores the liquid discharged from the capillary; and a cell sensing unit formed in the silicon substrate and disposed beneath the capillary, and which senses the cell number by measuring the resistance changing in accordance with the quantity of the light permeation determined by the dyed degree of the cell flowing along the capillary. The capillary, injected cell storing unit, discharged cell storing unit and the cell sensing unit are manufactured through a micro electro mechanical system.