Exact positioning of a wafer relative to a mask during semiconductor manufacture, whereby an alignment device with inner and outer frames is used that compensates keying elements

摘要

Plate shaped alignment element comprises the following: inner and outer frame parts with the inner frame part arranged with an element of free play relative to the outer frame and also able to tilt slightly relative to it; a fastening element that is attached to the inner frame part and that can be clamped in position after the inner frame has been correctly aligned relative to the outer.