VERFAHREN UND VORRICHTUNG ZUR ANALYSE OPTISCHER PARAMETER,申请号DE19976013767T-传众专利搜索

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发明名称	VERFAHREN UND VORRICHTUNG ZUR ANALYSE OPTISCHER PARAMETER
摘要
申请公布号	DE69713767(T2)	申请公布日期	2003.03.06
申请号	DE19976013767T	申请日期	1997.04.30
申请人	THERMA-WAVE INC., FREMONT	发明人	OPSAL, JON;SIDOROWICH, J.
分类号	G01B11/06;G01N21/84;G01N21/88;H01L21/66;(IPC1-7):G01N21/84	主分类号	G01B11/06
代理机构		代理人
主权项
地址

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