| 摘要 |
PURPOSE: To provide a high-sensitivity and stable life estimating method for a rotating machine for a semiconductor manufacturing device. CONSTITUTION: This life estimating method comprises, a step (step S101) of measuring the acceleration of a rotating machine (dry pump) to obtain time series data, a step (step S102) of frequency-analyzing the time series data to obtain frequency spectrum, a step (step S103) of deciding an analysis object frequency, a step (step S104) of sampling measuring the reference time series data of peak acceleration corresponding to the analysis object frequency, and the evaluation time series data of peak acceleration, and a step (step S105) of creating the life evaluation data for the rotating machine to decide the life of the rotary machine using the reference time series data and the evaluation time series data.
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