COLOUR IMAGE SENSOR WITH ENHANCED CALORIMETRY AND METHOD FOR MAKING SAME

摘要

The invention concerns colour image sensors of very small size. The inventive sensor is produced by the following method: forming, on the front surface of a silicon wafer, a series of active zones (ZA) comprising image detection circuits and corresponding each to a respective image sensor, each active zone including photosensitive zones covered with a stack of conductive and insulating layers (14, 16) for collecting electric loads generated by the photosensitive zones; transferring the wafer by its front surface against the front surface of a support substrate (20); eliminating the major part of the thickness of the silicon wafer, leaving on the substrate a fine silicon layer (30) comprising the photosensitive zones; depositing and etching, on the thus thinned silicon layer, colour filters (18).