发明名称 METHOD FOR PRODUCING AN ELECTRONIC COMPONENT, ESPECIALLY A MEMORY CHIP
摘要 The invention relates to a method for producing an electronic component, especially a memory chip, using a laser-induced correction to equalise an integrated circuit by means of at least one laser via (15) in a layer at least partially covering the circuit. Said component comprises a rewiring of the contact pads. The inventive method comprises the following steps: each laser via is closed by means of a separate covering layer (16) which is to be applied locally; a rewiring extending between the local covering layers (16) is created; the local covering layers (16) are removed; and the laser-induced correction is carried out by means of the open laser vias.
申请公布号 WO03001588(A3) 申请公布日期 2003.03.06
申请号 WO2002EP05254 申请日期 2002.05.13
申请人 INFINEON TECHNOLOGIES AG;HEDLER, HARRY;IRSIGLER, ROLAND;VASQUEZ, BARBARA 发明人 HEDLER, HARRY;IRSIGLER, ROLAND;VASQUEZ, BARBARA
分类号 H01L21/66;H01L23/525 主分类号 H01L21/66
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