METHOD FOR MANUFACTURING COPLANAR LINE USING FERROELECTRIC THIN FILM

摘要

PURPOSE: A method for manufacturing a coplanar line is provided to reduce the size and weight of the device by using a ferroelectric thin film on the oxide substrate. CONSTITUTION: A coplanar line has a bottom surface with no electrode, and a structure of Pt/BST/MgO. The magnesium oxide(MgO) used as a substrate has a low dielectricity constant, and is suitable for the crystal growth. A barium strontium titanate is deposited on the substrate through an RF magnetron sputtering method, and a coplanar waveguide is manufactured by using a platinum electrode.