| 摘要 |
PURPOSE: An ion pump controller is provided to simplify the configuration of the current/voltage converting unit by using a resistor, while measuring the vacuum level of the ion pump in an easy manner. CONSTITUTION: An ion pump controller comprises a current/voltage converting unit(10) for sensing the ion current generated when DC power is applied to an anode and cathode of an ion pump, and converting the sensed ion current into a voltage; an amplifying unit(20) for amplifying the voltage output from the current/voltage converting unit into a predetermined voltage gain; an analog/digital converter(40) for converting the analog signal output from a multiplexer(30) connected to an output terminal of the amplifying unit, into a digital signal; a central processing unit(60) connected to the multiplexer and the analog/digital converter through an isolation unit(50), and which receives the digital signal from the analog/digital converter, calculates the vacuum level of the ion pump, and transmits/receives data and control signals to/from a personal computer(110), a programmable logic controller(100) or a distributed control system; a liquid crystal display unit(70) connected to the central processing unit, and which displays signals output from the central processing unit; a keypad(80) connected to the central processing unit, and which inputs signals from an external source; and a digital/analog converter(90) connected to the central processing unit, and which converts the digital signal output from the central processing unit into an analog signal and transmits the analog signal to the programmable logic controller or the distributed control system.
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