发明名称 Crystalline thin film semiconductor device e.g. photovoltaic cell, has p-type polycrystalline silicon layer which is formed by crystallizing amorphous silicon layer formed on glass substrate
摘要 An amorphous silicon layer (3) formed on a glass substrate (1), is crystallized through nickel layer (4) to form a p-type polycrystalline silicon layer of specific orientation. An i-type polycrystalline silicon layer is then formed on the p-type polycrystalline silicon layer. An Independent claim is also included for crystalline thin film semiconductor device manufacturing method.
申请公布号 DE10141090(A1) 申请公布日期 2003.03.06
申请号 DE2001141090 申请日期 2001.08.22
申请人 HITACHI CABLE, LTD. 发明人 OKA, FUMIHITO;MURAMATSU, SHINICHI;MINAGAWA, YASUSHI
分类号 H01L31/0368;H01L31/0392;H01L31/042;H01L31/18;(IPC1-7):H01L31/039;H01L31/036 主分类号 H01L31/0368
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