Method for recovering an organic solvent from a waste stream containing supercritical CO2

摘要

An organic solvent is separated from a waste stream comprising supercritical CO2, an organic solvent and etchant contaminants. The process comprises separating the supercritical CO2 by subjecting the waste stream to elevated temperature and/or reduced pressure to thereby obtain a first composition containing the supercritical CO2 and a second stream containing the organic solvent and being substantially free of the supercritical CO2; and then removing non-volatile etching contaminants from the second stream search as by at least one of the following: evaporation; distillation; filtration; centrifugation; and settling.