| 摘要 |
A substrate support assembly 30 comprises a support 38 with a substrate supporting surface 55 and a collar 130 comprising an electrical connector, whereby a voltage may be supplied to the collar 130 through the electrical connector. The collar 130 may pass a current therethrough to resistively heat the collar to a predetermined temperature before substrate processing. In another version, the temperature of the collar 130 may be controlled during and/or before substrate processing.
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