发明名称 Process for structuring a covering material for applying on a support substrate comprises preparing a planar plate as covering material and forming grooves on the material so that the grooves are arranged along dissection lines
摘要 Process for structuring a covering material for applying on a support substrate (5) comprises preparing a planar plate as covering material; and forming grooves (3) on the material so that the grooves are arranged along dissection lines (2) corresponding to a chip having an integrated component. Independent claims are also included for: (1) a process for assembling a component integrated in a support substrate; (2) a wafer or glass-silicon wafer composite having the above produced structure; and (3) a device for covering the component integrated in the support substrate. The covering material is made from a transparent material, preferably coated or structured glass, or plastic. The grooves are 200-500 microns wide and have a length which is shorter than the length of the corresponding dissection lines.
申请公布号 DE10141709(A1) 申请公布日期 2003.03.06
申请号 DE2001141709 申请日期 2001.08.25
申请人 SCHOTT GLAS 发明人 BIECK, FLORIAN
分类号 H01L23/48;(IPC1-7):B24B37/04;H01L21/302 主分类号 H01L23/48
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