HEATER ASSEMBLY FOR HEATING WAFER

摘要

PURPOSE: A heater assembly for heating a wafer is provided to reduce a thermal difference between a center part and a peripheral part of a wafer and enlarge an exchange period of a heater. CONSTITUTION: A heater assembly(900) is formed with a heater(100), a power supply portion(200), and a support plate(300). The heater(100) is installed at a lower portion of a susceptor(400) for supporting a wafer(500) in order to supply the heat to the susceptor(400). The support plate(300) is used for supporting the power supply portion(200) and the heater(100). An insulating member(110) is formed in the inside of the heater(100). An input terminal(120) and an output terminal are formed at a peripheral portion of the heater(100). The power supply portion(200) has a lead portion(220), a power connection portion(240), and a control portion. The support plate(300) is formed with an upper support portion(310) and a lower support portion(320).