发明名称 |
Substrate having character/symbol section and processing method of character/symbol section |
摘要 |
The present invention provides a substrate-engraving-type chromeless phase-shift mask enabling to adopt a manufacturing method which poses no problem in quality, gives a high operating efficiency, and permits arrangement of characters and symbols, and a manufacturing method thereof. The substrate of the invention has a character/symbol section, on a surface of a transparent substrate, comprising characters and/or symbols engraved in the form of a slit-shaped or lattice-shaped pattern comprising concave grooves only in a prescribed portion corresponding to the characters and/or symbols. |
申请公布号 |
US2003044730(A1) |
申请公布日期 |
2003.03.06 |
申请号 |
US20020235737 |
申请日期 |
2002.09.05 |
申请人 |
FUJIMOTO SHIGEKAZU;KURIHARA MASAAKI |
发明人 |
FUJIMOTO SHIGEKAZU;KURIHARA MASAAKI |
分类号 |
G02B5/18;G03F1/00;G03F1/08;G03F1/34;G03F1/38;G03F1/68;H01L21/027;(IPC1-7):G03C5/00 |
主分类号 |
G02B5/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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