| 摘要 |
A processing chamber comprising a reaction vessel having an electro-reaction cell 420 including a virtual electrode 430 unit, an electrode assembly 414 disposed relative to the electro-reaction cell to be in fluid communication with the virtual electrode unit, and an electrode 470 in the electrode assembly. The virtual electrode unit has at least one opening defining at least one virtual electrode in the electro-reaction cell. The electrode assembly can include an electrode compartment 450 and an interface element 460 in the electrode compartment 450. The interface element 460 can be a filter, a membrane, a basket, and/or another device configured to hold the electrode. The interface element, for example, can be a filter that surrounds a basket in which the electrode is positioned. |
