STRUCTURE FOR CONNECTING OPTICAL WAVEGUIDE TO SEMI- CONDUCTOR PHOTODETECTOR

摘要

PROBLEM TO BE SOLVED: To efficiently receive the propagation light of an optical waveguide in a semi-conductor photodetector which is arranged in a direction perpendicularly crossed with the light propagating direction of the optical waveguide on a baseboard. SOLUTION: The propagation light is propagated through clad parts 13 and 15 formed on the baseboard 11 and the optical waveguide having core parts 14a-14c in the clad parts 13 and 15. A system is a connection structure constituted by connecting the semi-conductor photodetector 12 to the optical waveguide for detecting the propagation light by the semi-conductor photodetector 12 which is arranged in the neighborhood of the core part 14b on the baseboard 11. The width of the core part 14b is enlarged at a part near the light receiving surface of the semi-conductor photodetector 12 so as to permit the photodetector 12 to receive the propagation light leaked from the core part 14b. Then the connection structure of the optical waveguide and the semi-conductor photodetector is obtained by which the light is received and detected in a wide light receiving dynamic range and also production is performed with high productivity.