Système de contrôle d'épaisseur,申请号FR19610857756-传众专利搜索

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发明名称	Système de contrôle d'épaisseur
摘要
申请公布号	FR1285700(A)	申请公布日期	1962.02.23
申请号	FR19610857756	申请日期	1961.04.05
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人
分类号	C23C14/54;G05D5/03;G05D7/06;H01L21/00	主分类号	C23C14/54
代理机构		代理人
主权项
地址

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