| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact integrated valve shortening installation intervals of gas supplying devices. SOLUTION: An attaching plate heating member 22 is fixed to a rear face of an attaching plate 21. At this point, the attaching plate heating member 22 is closely fixed to attaching plate 21 so that heat generated by the attaching plate heating member 22 is directly transmitted to the attaching plate 21. A plurality of the gas supplying devices 2 are attached to a surface of the attaching plate 21 so that heat of the attaching plate 21 heated by the attaching plate heating member 22 is transmitted to bottom bases of the gas supplying devices 2.
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