发明名称 CHEMICAL SUBSTANCE DETECTION METHOD AND APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a chemical substance detection method and a chemical substance detection apparatus where a chemical substance is strongly adsorbed on a sensitive body for losing a function as a sensor and the chemical substance is struck to a sampling system (piping, valves, and the like) in the apparatus and the sensor cannot continue to respond. SOLUTION: When the value of electric signals or a calculation value based on the value of electric signals reaches a fixed value, a medium to be supplied to the chemical sensor 9 is switched to a medium that does not contain any chemical substances to be detected or a medium (cleaning medium 3) containing a chemical substance to be detected at fixed concentration or less. In this case, preferably, the temperature of the sensitive body or the medium is increased by the heater 13 or the heater 12.
申请公布号 JP2003065927(A) 申请公布日期 2003.03.05
申请号 JP20010252850 申请日期 2001.08.23
申请人 MITSUBISHI ELECTRIC CORP 发明人 KAMIYAMA TOMOTSUGU;HIJIKATA KENJI
分类号 G01N5/02;(IPC1-7):G01N5/02 主分类号 G01N5/02
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