发明名称 ECCENTRICITY MEASURING DEVICE AND ECCENTRICITY MEASURING METHOD
摘要 PROBLEM TO BE SOLVED: To simply perform highly accurate measurement by reducing the influence of a disturbance caused by the fluctuation of the air, vibration or the like, and prevent decline of measurement accuracy by the influence of a measurement error caused by reflected light from other optical member surfaces which are not a measuring object for eccentricity. SOLUTION: Coherent light 91 emitted from a light source 11 is split into measuring light 91a and reference light 91b, and measuring light 91a is cat's eye reflected by the test lens surface 1a, and reference light 91b is reflected by a reflection means (light transmission reflection means 15) without allowing to reach a test lens 1. Measuring light 91a cat's eye reflected by the test lens surface 1a and reference light 91b reflected by the reflection means (light transmission reflection means 15) are superposed to form an interference fringe on the light-receiving surface of an image sensor 19, and eccentricity of the test lens 1 against a reference axis is determined based on the fluctuation of the interference fringe generated when the test lens 1 is rotated around the reference axis (optical axis L of the whole lens system).
申请公布号 JP2003065895(A) 申请公布日期 2003.03.05
申请号 JP20010256929 申请日期 2001.08.27
申请人 NIKON CORP 发明人 RYU SHIKYO
分类号 G01B11/27;G01J9/02;G01M11/00;(IPC1-7):G01M11/00 主分类号 G01B11/27
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