| 摘要 |
PROBLEM TO BE SOLVED: To provide a position sensor capable of making the range of a photo- detection area as large as possible. SOLUTION: The position sensor is composed of a plurality of photodiodes 3 being elements that sense light intensity and being disposed on a flat surface, and a calculating means which calculates the central position of a laser beam L from the output of the photodiode 3 irradiated with the laser beam L on the basis of the assumption of Gaussian distribution.
|
