| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for measuring the height of bump, which can stably measures the height even for a minute bump made of gold or the like. SOLUTION: In the method, laser light is obliquely projected on the bump being an object to be measured, and the reflecting light is received by a position detecting element, and the height of the bump is measured from a receiving point on the position detecting element using the triangulation method. The measurement of height is carried out while relatively moving the bump to the measuring position, and the height of bump is measured based on the obtained successive data of the height.
|
