LIQUID EJECTION DEVICE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To resolve the problem of a conventional liquid ejection device such as that pressure fluctuations by a pressurized body are not effectively transmitted to an ejection port side in the head of a liquid ejection device such as an ink jet or the like. SOLUTION: When a groove for an ejection port and a groove for supply port are to be formed on one face of a silicon substrate, the depth of the groove for the supply port is formed deeper than that of the groove for ejection port. When the groove for the supply port passes through the pressurizing chamber, the bottom face can be inclined by forming the pressuring chamber into a stair shape on a pattern to be formed by dry etching, so that the liquid which has been subjected to a variation of pressure by a pressurized body is effectively guided by an ejection movement to remarkably improve its ejection performance.