| 摘要 |
PROBLEM TO BE SOLVED: To save the trouble of setting the position of a substrate retaining pin by labor in order to avoid a part-mounted spot, when a substrate with parts mounted on the lower face is retained using a substrate retaining pin. SOLUTION: A plurality of substrate retaining pins 8 and a pin drive mechanism for retaining the substrate retaining pin 8 and transferring it back and forth are provided as a substrate retaining mechanism 7 of the substrate 10 with a projecting part formed on the lower face. In addition, the pin drive mechanism comprises a cylinder 40 having an internal tightly closed space, a piston 41 which has an attached substrate retaining pin 8 and moves inside the cylinder 40, a first gas supply hole 42 which is opened at one of the internal ends of the cylinder 40 and communicates with the tightly closed space, a second gas supply hole 43 which is opened at the internal other end of the cylinder 40 and communicates with the closed space, a mechanism which supplies a low-pressure gas from the first gas supply hole 42 into the cylinder 40 and a mechanism which supplies a high pressure gas from a second gas supply hole 43 into the cylinder 40.
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