| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a positioning device capable of preventing deterioration in accuracy due to displacement of an observation device itself when aligning two objects. SOLUTION: In the device, a first supporting means installed in a translation movable moving part supports a first object. A first detecting means installed in the moving part detects the position coordinate of the object observed at a first observed coordinate system. A second supporting means supports a second object so as to allow both counterplanes to face each other, slightly-spaced apart from the first object supported by the first supporting means. A second detecting means with its position relative to the second supporting means arrested detects the position coordinate of the object observed at a second observed coordinate system. The second detecting means can observe the first object by shifting the moving part. A coordinate correlating means correlates the first observed coordinate system with the second observed coordinate system. Consequently the first detecting means can observe the second object by shifting the moving part in the X-axis direction.</p> |
